Method and Apparatus for a Cleanspace Fabricator

ABSTRACT

A fab can be constructed as a round or rectangular annular tube with a primary cleanspace located in-between its inner and outer tubes. The fab can be encircled with levels upon which tools can be densely packed while preserving unidirectional air flow. If only tool ports are inside, and robotics are used, primary cleanspace size can be minimized. Highly simplified robotics can be used. Tools can be removed and repaired centrally. A secondary cleanspace can be added for tool bodies. Multilevel construction enhances use of prefabricated units for fab build or maintenance. Curves or folds, applied to a conventional planar cleanroom, can construct a wide range of fab geometries, including a tubular non-annular fab. A fab can also be constructed according to a curved or non-curved sectional cut of an annular tube. A novel fab, of a non-curved section, can include a non-segmented cleanspace or have its tools vertically stacked.

FIELD OF THE INVENTION

The present invention relates to fabricators that utilize cleanspaces.

BACKGROUND OF THE INVENTION

A known approach, to cleanspace-assisted fabrication, is to assemble themanufacturing facility as a “cleanroom.” In such cleanrooms, processingtools are arranged to provide aisle space for human operators orautomation equipment. An example text on cleanroom design (referred toherein as “the Whyte text”) is as follows: “Cleanroom Design, SecondEdition,” edited by W. Whyte, published by John Wiley & Sons, 1999, ISBN0-471-94204-9. The Whyte text is incorporated herein by reference in itsentirety.

Cleanroom design has evolved over time to include the followingtechniques. Having processing stations located inside clean hoods.Having vertical unidirectional air flow through a raised floor, withseparate cores for the tools and aisles. Having specializedmini-environments that surround only the processing tool for added spacecleanliness. The “ballroom” approach, where tools, operators andautomation all reside in the same cleanroom.

Evolutionary improvements have enabled higher yields and the productionof devices with smaller geometries. However, known cleanroom design hasdisadvantages and limitations.

For example, as the size of tools has increased and the dimensions ofcleanrooms have increased, the volume of cleanspace that is controlledhas concomitantly increased. As a result, the cost of building thecleanspace, and the cost of maintaining the cleanliness of suchcleanspace, has increased.

Tool installation in a cleanroom can be difficult. The initial “fit up”of a “fab” with tools, when the floor space is relatively empty, can bestraight forward. However, as tools are put in place, and a fab beginsto process substrates, it can become increasingly difficult, anddisruptive of job flow, to either place new tools or remove old ones. Itwould be desirable to reduce the installation difficulties, attendant todense tool placement, since denser tool placement otherwise affordssubstantial economic advantages for cleanroom construction andmaintenance.

Another area of evolutionary improvement has come with improvements inrobotics. Substrate processing has changed from a manually intensiveprocess where human operators handle substrates or batches ofsubstrates. In current cleanroom designs, the tools can include roboticsfor substrate handling, with human operators only needing to perform thefollowing functions: loading collections of substrates onto tools,unloading collections of substrates from tools and moving collections ofsubstrates from one tool to another. In some cases, automation performsall handling and logistics operations. Despite the evolutionaryadvances, cleanroom robotics remain extremely complex. The robotics cantherefore be error prone and costly.

It would be desirable to have manufacturing facilities, forcleanspace-assisted fabrication, that use less cleanspace, permit densetool placement while maintaining ease of installation and permit the useof simpler robotics.

SUMMARY OF THE INVENTION

Please refer to the Glossary of Selected Terms, included at the end ofthe Detailed Description, for the definition of certain selected termsused in the below Summary. Section numbers in the below Summarycorrespond to section numbers in the Detailed Description.

1. Summary of the Ballroom Approach

Details of a large modern ballroom cleanroom are presented to illustratesome of the functional requirements of a fabricator that are addressedby the present invention.

A distinctive feature, of the ballroom approach to cleanroom design, isthat the tools, automation, robotics and personnel can be foundoccupying the same cleanspace.

A ballroom cleanroom can have an area on the order of 90,000 squarefeet. These dimensions imply that the cost of construction of the fab,and the cost of cleaning the cleanroom air, are quite high. In general,these costs are related to both the volume of air that needs to becleaned and to the vertical height, of the cleanspace, that theunidirectional air must traverse.

The relatively large planar aspect of the cleanroom space makes forsubstantial dimensions with respect to logistics.

Since most tools cannot reside on the perimeter of the ballroom plane,once a tool is located in its position, at some interior location of thetwo dimensional plane, it is difficult to move or remove the toolwithout disturbing other tooling and logistics in the cleanspace.

2. Summary of a Round Tubular Annular Fab 2.1. Summary of OverallConstruction

An example embodiment of a round tubular annular fab, constructed inaccordance to principles of the present invention, is presented. A basicgeometric shape, according to which the round tubular annular fab can beconstructed, can be referred to as a round annular tube. It is comprisedof an outer tube and an inner tube, where the inner tube defines theannular region. The primary cleanspace is located in-between the innerand outer tubes.

An example embodiment of a round tubular annular fab can be encircledwith shelves (or levels) upon which tools are located. The number oflevels is not limited to a particular value.

The example cleanspace fabricator presented can be used to make standardsemiconductor substrates.

In an example embodiment of a round tubular annular fab, the outerprimary cleanspace wall is the air source wall and the inner primarycleanspace wall is the air receiving wall.

Details are presented on how the air source, and air receiving, walls ofa primary cleanspace can be constructed.

The air source wall can be constructed of panels, an example embodimentof which is presented.

An example embodiment of a round tubular annular fab locates tool bodieson the exterior of the outer primary cleanspace wall and each tool'sport on the inside of the primary cleanspace.

Air flow, for a fabricator constructed in accordance with the principlesof the invention, needs to achieve enough velocity such that aunidirectional flow regime, in accordance with standard requirements forcleanroom-assisted fabrication, is established.

A geometric property of a round tubular annular fab, when its tools areplaced at peripheral locations of the primary cleanspace, is that eachtool can be provided with a property referred to as “unobstructedremovability.” In particular, each tool has an essentially straight pathby which it can be installed or removed, without encountering eithersignificant structural components of the fab or the bodies of othertools. To the extent a tool body is located exterior to the outer wallof the primary cleanspace, in which its port operates, unobstructedremovability can be enhanced.

Unobstructed removability can offer at the least the following advantagewhen removing a tool from the manufacturing line: the fab operations inthe region of the tool need only be stopped, if at all, during therelatively brief time period when the tool is removed and a replacementtool is installed. The removed tool can then be serviced at a locationoutside the fab, with the replacement tool taking over the productionrequirements.

In addition to enhancing unobstructed removability, to the extent thebody of each tool is located exterior to the primary cleanspace, thevolume of the primary cleanspace can be reduced. The primary cleanspacecan be reduced to a minimum size, with respect to serving the spaceneeds of the tools, if only the tool ports are located in the primarycleanspace. In this case, the primary cleanspace only needs to providefor material transport. Space for material transport can be furtherreduced if only robotics is used. Minimizing the space for materialtransport can minimize the technical and economic requirements forestablishing unidirectional flow and adequate cleanliness.

A primary cleanspace, designed in accordance with the general layout ofa round annular tube shape, permits the establishment of unidirectionalair flow even when the density of tool placement, per unit area ofprimary cleanspace wall, is extremely high. Denser tool placement, whenit does not impair clean air flow, provides economic advantages. Forexample, denser tool placement can permit the overall size of acleanspace-assisted manufacturing facility to be reduced.

2.2 Summary of Robotics and Logistics

Compared with the robotics needed for conventional ballroom cleanrooms,fabs designed in accordance with the present invention can utilizehighly simplified robotics.

A fab designed in accordance with the round annular tube shape, forexample, has a primary cleanspace geometry that approximates a curvedtwo-dimensional space. A robot to support such a primary cleanspace onlyneeds two degrees of gross movement capability.

An example of how robots can be located, in the primary cleanspace of around tubular annular fab, is presented.

Redundant robotics equipment can be desirable so that, in the case ofonly some robots malfunctioning or needing servicing, transportation ofjobs can continue.

The logistics of transport between tools can also be simplified,compared to known approaches to cleanroom design, since job transportcan occur with a “fluid” motion that combines varying the two grossdegrees of freedom, angle and height, simultaneously.

2.3 Summary of Including a Secondary Cleanspace

In the round tubular annular fab designs discussed thus far, while toolports are located in a primary cleanspace, tool bodies are placed in anunspecified environment that can be clean or not.

Techniques are presented by which the tool bodies can be placed in asecondary cleanspace. An exterior boundary wall can be added. As withthe primary cleanspace, unidirectional flow can be achieved byconstructing the secondary cleanspace with an air source wall and an airreceiving wall.

The cleanliness requirements of the secondary cleanspace can bedifferent than the primary cleanspace. Typically, the secondarycleanspace can have less stringent cleanliness requirements.

There can be a sealing surface on the body of each tool where itintersects the exterior wall forming the secondary cleanspace. Theintersection can be constructed to permit relatively simple and fastremoval of a tool (and thereby preserve the property of unobstructedremovability).

(Section 2.4 “Utilities Support” is not summarized.)

2.5. Summary of Construction Advantages

An advantage realized with the multilevel aspect of the round tubularfab is during its construction or “build.” Lessening the time of a fab'sbuild can provide significant economic advantages.

Each level of a fab can be constructed of two types of sub-units.Multiple copies, of each type of sub-unit, can be prefabricated.

Utilization of two types of sub-units is just an example of aprefabrication strategy. Any appropriate unit of a fab can be chosen forprefabrication.

In addition to assisting in the initial “build” of a fab, prefabricatedunits can be used in the maintenance or repair of a fab.

3. Summary of Alternate Embodiments 3.1 Summary of Overview

When constructing a fab in accordance with teachings of the presentinvention, there are other shapes, besides the round annular tubularshape, that can be used.

An example, of such other shapes, is the rectangular annular tubularshape. A fab constructed in accordance with this shape, referred to as arectangular tubular annular fab, is presented.

In general, the round annular tubular shape and the rectangular annulartubular shape can be viewed as specific instances of the technique ofcurving or folding the conventional planar ballroom cleanroom to producea primary cleanspace. This curving or folding technique can be appliedto produce numerous alternative shapes to the types focused on herein.For purposes of example, and without limitation, these shapes caninclude non-annular tubes, spheres, hemispheres and pyramids.

One skilled in the area of conventional fabricator design can readilyappreciate how the techniques presented herein can be applied to othercleanspace geometries. Based upon the discussion of a round tubularannular fab, it can readily be appreciated how the property ofunobstructed removability can be preserved with other primarygeometries. Also, based upon the discussion of a round tubular annularfab, it can readily be appreciated how the technique of prefabricationcan be applied to other geometries.

Examples, of how the techniques presented herein can be applied to othercleanspace geometries, are presented. These example geometries are asfollows: a round tubular non-annular fab, a rectangular tubular annularfab and a section of a tubular annular fab.

3.2 Summary of Round Tubular Non-Annular Fab

The round tubular non-annular fab is related to the round tubularannular fab. With its tools arranged at locations peripheral to theprimary cleanspace, the property of unobstructed removability can bepreserved. With its primary cleanspace being divided into levels, likethose presented for round tubular annular fab, similar opportunities arepreserved for using prefabricated units in its construction, repair ormaintenance.

Technical difficulties of a round tubular non-annular fab, compared withthe annular version, are discussed.

3.3 Summary of Rectangular Tubular Annular Fab

The rectangular tubular annular fab is related to the round tubularannular fab. With its tools arranged at locations peripheral to theprimary cleanspace, the property of unobstructed removability can bepreserved. With its primary cleanspace being divided into levels, likethose presented for round tubular annular fab, similar opportunities arepreserved for using prefabricated units in its construction, repair ormaintenance.

Differences, between a rectangular tubular annular fab and round tubularannular fab, are also presented.

Some differences include the following. In a rectangular tubular annularfab the support shelves are straight and the cleanspace has corners thatcan cause turbulence.

The robotics can be similar to the robotics of the round tubular annularfab, but some differences are discussed.

In an analogous fashion to the round tubular annular fab, an outer wallcan be added to a rectangular tubular annual fab to form a secondarycleanspace for the tool bodies.

The establishment of unidirectional air flows, in the primary and/orsecondary cleanspaces, is presented.

3.4 Summary of Section of a Tubular Annular Fab

A variation, on the tubular annular fab, either round or rectangular,can be created by “cutting” (or sectioning) off a portion of the fabalong a cut line or lines. The selection of an appropriate cut line canbe guided by various considerations, including its effect on thecomplexity of transport automation.

Example sectionalizations, for greater access to annular regions, arepresented.

An example sectionalization, that can be served by relatively simpletransport automation, results from application of the following cut lineto a rectangular tubular annular fab: a cut line that lies on onestraight side of the interior annular region. The fab thus formed is,essentially, a one-quarter section of a rectangular tubular annular fab(referred to herein as a “one-quarter rectangular tubular annular fab”).An example of this type of fab is shown.

In general, however, while a section of a tubular annular fab may nolonger have a curved primary cleanspace, a novel fabricator can still berealized if it has at least one of the following two configurations.

A first configuration is that tools of the fabricator be stacked, one ontop of the other, according to a vertical dimension (i.e., along adimension substantially parallel to gravity). While not necessary, animportant additional improvement, for the first configuration, is thateach tool body of the fabricator be placed at a peripheral location ofthe primary cleanspace.

The second configuration is a combination of the fabricator's primarycleanspace being nonsegmented and having the tool bodies at peripherallocations of the primary cleanspace where at least a portion of the toolbodies are outside the primary cleanspace.

Other than the fact that a section has been taken of a tubular annularfab, a section of a tubular annular fab can be constructed in,essentially, the same way that a non-sectioned tubular annular fab isconstructed.

Sectional tubular annular fabs share advantages in common withnon-sectional tubular annular fabs. Dense tool placement is enabled.Primary cleanroom space can be reduced to the minimum required fortransport automation. In the case of sectional rectangular tubularannular fabs, the same linear placement of tools along the outer wall ofthe primary cleanspace, as in a rectangular tubular annular fab, can beutilized.

The location of the tool bodies, along the outer wall of the primarycleanspace, tends to preserve the property of unobstructed removability.The fabricator being divided into levels, like those of round tubularannular fab, provides similar opportunities for using prefabricatedunits in its construction, repair or maintenance.

The planar aspect of the one-quarter rectangular tubular annular faballows for alternate types of robotic design.

The construction of the air source wall for the primary cleanspace, frompanels that include filters, can be accomplished in an equivalentfashion to that discussed for the round tubular annular fab.

An exterior boundary wall can be added in order to establish a secondarycleanspace for the tool bodies. Example unidirectional air flows, forthe primary and/or secondary cleanspaces, are presented.

Tool bodies can intersect the exterior wall of the secondary cleanspacein the same way that tool bodies intersect the exterior wall for thesecondary cleanspace of a round tubular annular fab. In addition toproviding a seal, the intersection can be constructed to permitrelatively simple and fast removal of a tool (and thereby preserve theproperty of unobstructed removability).

4. Summary of Scaling Issues

An inventive cleanspace-assisted fabricator, as described above, can bescaled larger or smaller depending upon the particular needs of thefabricator's users.

As an alternative, or as an addition, to scaling a fab, multiple copiesof a fab can be coupled together to produce a facility that, overall,provides greater throughput.

The cleanspace fabricator designs presented herein can be scaled down toconstruct fabrication facilities (referred to herein as a “minifab”) ofa size that would typically be considered impractical for conventionalfab designs. For example, a minifab can be constructed that uses aminimal number of tools for implementation of a process (e.g., one toolfor each tool type).

The costs associated with a minifab can be reduced, for example, by theunobstructed removability of its tools. A tool needing repair (or otherservicing) can be easily replaced by relatively unskilled personnel. Thetool to be serviced can then be “sent out” for such servicing. Forexample, the tool needing service can be sent out for repair by a partyother than the party that owns or operates the minifab. Centralizedpooling of the repair function can permit the cost, per repair, to bereduced.

In contrast, with a ballroom type fab, the cost of removing a tool fromthe fab can be higher than the savings in repair cost gained bytransporting the malfunctioning tool to a centralized pooling of therepair function.

5. Summary of Completing a Fabricator

The novel cleanspace fabricators presented can be accomplished withrelatively minor adaptations of known components and materials.

The process, by which an automation system determines the next tool towhich a job should be sent, can be referred to as a “logisticshierarchy.” Only the lowest levels, of such logistics hierarchies, arespecific to the physical layout of the fab it controls. The lowestlevels comprise the means by which a job, at a physical starting toollocation, is transported to a correct next-tool physical location tocontinue a process.

Thus, to adapt a logistics hierarchy to a particular fab's physicalrealization, one need only solve the following control issue: thetransfer of a job from one arbitrary physical tool location of the fabto any other arbitrary physical tool location of the fab.

An example logistics hierarchy is presented.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, that are incorporated in and constitute apart of this specification, illustrate several embodiments of theinvention and, together with the description, serve to explain theprinciples of the invention:

FIG. 1A depicts an elevation view of a cleanroom, constructed accordingto the known “ballroom” approach.

FIG. 1B depicts a cross section of the same cleanroom of FIG. 1A.

FIG. 2 depicts an elevation detail of the cleanroom of FIG. 1A.

FIG. 3 depicts examples shapes formed when a cleanroom is closed uponitself.

FIG. 4A depicts a round tubular annular fab, elevation view (an XYZ axisis indicated by numeral 450).

FIG. 4B depicts a round tubular non-annular fab (i.e., a round tubularfab without an annular region), elevation view (an XYZ axis is indicatedby numeral 450).

FIG. 5 depicts a round tubular annular fab, top view.

FIG. 6A depicts a round tubular annular fab, top view, withunidirectional air flow shown.

FIG. 6B depicts a round tubular non-annular fab, top view withunidirectional air flow shown.

FIG. 6C depicts a side view of a round tubular non-annular fab withmultiple level cleanspace air flow shown.

FIG. 7 depicts a round tubular annular fab, detailed elevation view,with robotics shown.

FIG. 8A depicts a view of wall construction with a HEPA filter panels.

FIG. 8B shows a detailed (elevation) view of the construction of a wallpanel that includes HEPA filters.

FIG. 8C shows a detailed (elevation) view of a HEPA filter wall panelwith a tool port attached.

FIG. 9A depicts a round tubular annular fab, elevation view, with asecondary cleanspace.

FIG. 9B depicts a round tubular annular fab, top view, with secondarycleanspace and unidirectional air flows shown.

FIG. 10 shows, schematically, primary cleanspace air-flow-source wallwith ports (interior view from opposite wall of primary cleanspace).

FIG. 11A shows a trajectory of a job transfer from one tool to anothertool in a ballroom cleanspace.

FIG. 11B shows a higher magnification view of two regions of FIG. 11A.

FIG. 11C shows a trajectory of a job transfer from one tool to anothertool in a round tubular annular fab.

FIG. 12 depicts a construction technique for a round tubular annularfab.

FIG. 13 depicts a rectangular tubular annular fab, elevation view (anXYZ axis is indicated by numeral 1350).

FIG. 14 depicts a rectangular tubular annular fab, detailed elevationview, with primary and secondary cleanspaces.

FIG. 15A depicts a rectangular tubular annular fab, elevation view, withprimary cleanspace air flow shown.

FIG. 15B depicts a rectangular tubular annular fab, top view, withprimary and secondary cleanspace unidirectional air flows shown.

FIG. 16 depicts a one-quarter section of a rectangular tubular annularfab, elevation view (an XYZ axis is indicated by numeral 1650).

FIG. 17 depicts a one-quarter section of a rectangular tubular annularfab, elevation view, with robotics shown.

FIG. 18 depicts a one-quarter section of a rectangular tubular annularfab, top view, with robotics and an air flow shown.

FIG. 19 depicts a one-quarter section of a rectangular tubular annularfab, elevation view, with primary and secondary cleanspaces shown.

FIG. 20 depicts a one-quarter section of a rectangular tubular annularfab, top view, with primary and secondary cleanspace air flows shown.

FIG. 21 depicts a plurality of one-quarter section rectangular tubularannular fabs, elevation view, coupled together for inter-section jobflow.

FIG. 22 depicts an example logistics hierarchy.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

Reference will now be made in detail to preferred embodiments of theinvention, examples of which are illustrated in the accompanyingdrawings.

Wherever possible, the same reference numbers will be used throughoutthe drawings to refer to the same or like parts.

Please refer to the Glossary of Selected Terms, included at the end ofthis Detailed Description, for the definition of certain selected termsused below.

TABLE OF CONTENTS TO DETAILED DESCRIPTION

1. Ballroom Approach

2. A Round Tubular Annular Fab

-   -   2.1. Overall Construction    -   2.2. Robotics and Logistics        -   2.2.1. Ballroom Inter-Tool Job Transfer        -   2.2.2. Round Tubular Annular Fab Inter-Tool Job Transfer    -   2.3. Including A Secondary Cleanspace    -   2.4. Utilities Support    -   2.5. Construction Advantages

3. Alternate Embodiments

-   -   3.1. Overview    -   3.2. Round Tubular Non-annular Fab    -   3.3. Rectangular Tubular Annular Fab    -   3.4. Section of A Tubular Annular Fab

4. Scaling Issues

5. Completing A Fabricator

6. Concise Formulations of The Invention

-   -   6.1. Ways To Construct A Fabricator    -   6.2. Fabricator Constructions    -   6.3. Ways To Process Jobs

7. Glossary of Selected Terms

1. BALLROOM APPROACH

In FIGS. 1 A, 1B and 2 are presented details of a large modern cleanroomconstructed according to the “ballroom” approach. The particularfabricator shown is related to semiconductor manufacturing. FIGS. 1A, 1Band 2 are intended to illustrate some of the functional requirements ofa fabricator that are addressed by the present invention.

A large open space (e.g., see 124 of FIG. 1B) is shown that forms thecleanroom where unidirectional air flow is maintained to provide a cleanenvironment. As can be seen in FIG. 1A, tools 110 are arranged incolumns and rows on the cleanroom floor.

Floor 126 of the cleanroom (see FIG. 1B) can be raised and perforated,to permit air flow to originate at the ceiling 120 and exhaust throughthe floor. The cleanroom ceiling can contain space 121 (FIG. 1B) forutilities (e.g., fans or ducts) to originate an air flow which passesthrough ceiling-suspended HEPA filtration systems 120 to provide a cleanair flow through cleanroom space 124. Basement space 123 (FIG. 1B),under floor 126, can contain additional utilities, including ducts toreceive air exhausting through raised floor 126. Basement space 123 canalso provide utilities (e.g., chemicals and gasses) to support thetools.

A distinctive feature, of the ballroom approach to cleanroom design, isthat the tools, automation, robotics and personnel can be foundoccupying the same cleanspace 124.

FIG. 2 shows a simplified close-up drawing of a tool 210 in an examplefab. Tool 210 is shown as placed on a perforated floor 217 and abovetool 210 is a HEPA-filter ceiling 211. Tool 210 has a port 216. A job tobe processed by the tool can enter through port 216. Once tool 210 hascompleted its processing of a job, such job can also exit the toolthrough port 216. The drawing represents a job as a cube and two examplejobs are shown: job 213 and job 214.

FIG. 2 also shows a rail system by which jobs can reach tool 210 forprocessing. Once tool 210 has finished processing a job, the rail systemcan also be used to send such job to other tools in the fab. Job 214 isshown as moving along a horizontal (or overhead) rail 215 that can beattached to the cleanroom ceiling. Port 216 is shown as coupled tooverhead rail 215 via an intermediate rail comprised of a verticalportion 219 and a horizontal portion 218. Job 213 is shown as movingalong vertical portion 219 of the intermediate rail. Via theintermediate rail, a job from port 216 can travel to overhead rail 215or a job from overhead rail 215 can travel to port 216.

As indicated in FIG. 1A, a ballroom cleanroom can have horizontaldimensions 111 and 112 each on the order of 300 feet, implying an areaon the order of 300², or 90,000 square feet. These dimensions imply thatthe cost of construction of the fab, and the cost of cleaning thecleanroom air, are quite high. In general, these costs are related toboth the volume of air that needs to be cleaned and to the verticalheight, of the cleanspace, that the unidirectional air must traverse.

For purposes of logistics, the cleanspace can be regarded as planartwo-dimensional space, with the ceiling height ignored. Transport ofmaterial from tool to tool occurs in this two dimensional space withpath lengths related to the distance between tools. The relatively largeplanar aspect of the cleanroom space makes for substantial dimensionswith respect to logistics.

Since most tools cannot reside on the perimeter of the ballroom plane,once a tool is located in its position, at some interior location of thetwo dimensional plane, it is difficult to move or remove the toolwithout disturbing other tooling and logistics in the cleanspace.

2. A ROUND TUBULAR ANNULAR FAB 2.1. Overall Construction

FIG. 4A depicts an example embodiment of a round tubular annular fab,constructed in accordance with principles of the present invention.Shape 314, of FIG. 3, depicts the basic geometry according to which theembodiment of FIG. 4A is constructed. Shape 314 can be referred to as around annular tube. It is comprised of an outer tube 321 and an innertube 320, where 320 defines the annular region. Shape 314 corresponds tothe fab of FIG. 4A as follows. The inner tube 320 corresponds to tube410 of FIG. 4A. Outer tube of 321 corresponds to tube 409 of FIG. 4A. Ina round tubular annular fab, constructed according to shape 314, theprimary cleanspace is located in-between the inner and outer tubes. InFIG. 4A, such primary cleanspace is located in-between tubes 409 and410.

In FIG. 4A, outer tube 409 is encircled with a steel support lattice,comprised of shelves 401 to 405 that are supported by vertical members,such as member 407. The lattice provides a support structure for toolsthat are arrayed at peripheral locations of the primary cleanspace. Inthe particular embodiment of FIG. 4A, the tools are arrayed around outerwall 409 of the cleanspace. More specifically, tools can be located oneach of the five shelves, or “levels,” 401, 402, 403, 404 and 405. InFIG. 4A, three tools are uniquely identified for reference: 420 (onlevel 401), 421 (on level 404) and 422 (on level 405).

The number of levels is not limited to a particular value, and is afunction of the specific needs of each fab. The vertical members (e.g.,407) are not limited to being of a particular type. The type and numberof such vertical members is a function of the weight, and types oftools, they need to support. As an example, a type of vertical member isa steel reinforced beam.

If the cleanspace fabricator of FIG. 4A is used to make standardsemiconductor substrates, then an example selection of tool type, foreach of tools 420, 421 and 422, is as follows: 420 can be a “wet clean”chemical processor, 421 can be an oxidation tool and 422 can be alithography tool. The placement of lithography tool 422 on “base” level405 can be an optimal location for minimizing vibrational interference.

To proceed further with the example selections of tool type, for each of420, 421 and 422, a job “x” can proceed through these tool types asfollows. Let us assume that job “x” has been newly-added to thecleanspace fabricator and the first task to be accomplished is theetching of alignment marks on its substrates. Job “x” can first becleaned by tool 420, to prepare it for further processing. Next, job “x”can be transferred to tool 421 where a thin layer of oxidation isformed. Third, job “x” can be transferred to tool 422 where an image ofthe alignment marks is defined on the wafers. In like fashion, furtherprocessing steps can occur, in the additional tools, to accomplish thedesired process.

FIG. 4A presents an example construction where outer primary cleanspacewall 409 is the boundary wall that is the source of clean air flow intothe primary cleanspace (i.e., wall 409 is the “air source wall”). InFIG. 4A, inner primary cleanspace wall 410 is the boundary wall thatreceives air flow from the primary cleanspace (i.e., wall 410 is the“air receiving wall”).

FIG. 8B depicts a detailed view of how a cleanspace air source wall(e.g., outer wall 409) could be constructed. FIG. 8A is a simplifiedversion of FIG. 4A. FIG. 8A is intended to emphasize the outer primarycleanspace wall 409 and inner primary cleanspace wall 410. FIG. 8Adepicts a region 810 of outer wall 409. FIG. 8B shows an expanded viewof region 810. In particular, FIG. 8B shows a panel 822 that can be usedto construct an air source wall. With regard to FIG. 8A, 822 is depictedfrom the perspective of someone situated on inner cleanspace wall 410and looking across the primary cleanspace to region 810 of outer wall409.

Panel 822 is shown as being able to hold four standard HEPA filters. Oneof the four HEPA filters is indicated by numeral 825 and another bynumeral 826. Each HEPA filter can be held in place by standard brackets(not shown).

Air can flow from a HEPA filter of a panel 822 towards inner primarycleanspace wall 410. A standard cleanroom air flow system (not shown)can provide a source of temperature and humidity controlled air forinput to the HEPA filters. Such standard cleanroom air flow system canalso provide a sink for such air, once it has reached the inner primarycleanspace wall.

A variety of ducts can be used to couple the air source to the HEPAfilters. For example, the HEPA filter diagonally across from HEPA filter825 has been removed to reveal a duct opening 827. Each duct opening 827couples to the air input of a HEPA filter. Each duct 827 can, in turn,be provided with air flow from a duct 828. Each duct 828 can be providedwith air from larger ducts, such as duct 414 of FIG. 4A.

The embodiment of FIG. 4A locates tool bodies on the exterior of theouter primary cleanspace wall. In this case, each tool's port is locatedinside the primary cleanspace. The body of the tool can mate up, to theexterior surface of the outer primary cleanspace wall, via a flange thatensures containment of the clean air within the primary cleanspace. Anexample suitable opening, in a primary cleanspace outer wall, is shownin FIG. 8B as round opening 824. Opening 824 can allow a tool's port topass into the primary cleanspace while providing a flange to ensureenvironmental containment.

A HEPA filter panel 850 is shown in FIG. 8C that has the same basicstructure as panel 822, except the port 852 is mounted onto panel 850.Example mounting hardware is depicted as items 853. When a job is placedon the port, for example at point 851, the job is accepted by theautomation of the port that passes the job through an opening in wall409 (e.g., an opening similar to 824 of FIG. 8B) and into the tool body.

FIG. 10 shows a portion of outer primary cleanspace wall 409, from theviewpoint of one situated on inner primary cleanspace wall 410 and“looking” across the primary cleanspace towards outer wall 409. Wall 409of FIG. 10 is comprised of panels of type 850 as shown in FIG. 8C. FIG.10 shows that, in locations where tool ports are located, air filterpanels could be covered by such tool ports. Alternatively, air filterpanels could be formed such that they only exist where they are notblocked by tool ports. Although such partial covering of air filterpanels, or irregular shaping of air filter panels, can disturb air flow,with corrective flow balancing, air can flow around these regions andstill maintain the unidirectional flow required for adequate aircleaning. The air filter panel arrangement of FIG. 10 has the advantageof introducing clean air sources close to regions of the cleanspace(i.e., where jobs enter tools for processing) where the prevention ofcontamination is most critical.

Other regions of panel 822, such as those indicated by numeral 823, canbe comprised of standard cleanroom materials.

Although a cleanspace formed from panels 822 can be called a tube with around cross section, standard HEPA filters are provided in rectangularform with flat profiles. The cross-section shape formed by arrayingpanels 822 around a circle, when such panel is comprised of rectilinearHEPA filters, can therefore be more accurately described as a multifacedpolygon that approximates a round shape.

The arrows in FIG. 6A present a top view of the air flow discussed inconnection with the example round tubular annular fab of FIG. 4A. Theair flow shown in FIG. 6A is perpendicular to the “Z” axis of thefabricator of FIG. 4A (an XYZ axis is indicated in FIG. 4A by numeral450). The flow of air though the HEPA filter panels can traverse theprimary cleanspace from the exterior boundary (409) to the interiorboundary (410). The arrows represent the fact that the air flow needs toachieve enough velocity such that a unidirectional flow regime, inaccordance with standard requirements for cleanroom-assistedfabrication, is established. The interior primary cleanspace wall allowsfor the air flow, within the cleanspace environment, to terminate andthen be conveyed or recirculated back to air flow fans.

In a manner similar to outer primary cleanspace wall 409, inner primarycleanspace wall 410 can be constructed with a lattice of beams andsupport members to produce a wall of sufficient structural strength.When the unidirectional air flow is designed to flow as shown in FIG.6A, the inner primary cleanspace wall can be constructed as the airreceiving wall. The air receiving wall (e.g., wall 410) can beconstructed with standard perforated material to allow for the exhaustof air through it. Standard ducting material, part of which is indicatedby numeral 412 in FIG. 4A, can convey the exhaust air back to the airflow fans. (FIG. 5, discussed further below, which shows a top view ofFIG. 4A, shows a top view 512 that corresponds to duct 412.) As withwall 409, air receiving wall 410 can also be constructed of panels, eachof which can include, among other items, the perforated surface andducting.

If it were desired to establish an air flow regime of the oppositedirection, the above-discussed design aspects of the inner and outerprimary cleanspace walls can be reversed. Wall 410 can be constructed asthe air source wall and wall 409 can be constructed as the air receivingwall. In particular, inner primary cleanspace wall 410 can beconstructed of panels 822 that are fed, through standard ductingmaterial, from the air flow source. Outer primary cleanspace wall 409can be constructed of perforated material that allows the unidirectionalclean air flow to terminate within the primary cleanspace. Outer primarycleanspace wall 409 can be coupled to standard ducting material suchthat the exhaust air is conveyed back to the air flow fans.

A geometric property of a round tubular annular fab is that each toolcan be provided with a relatively unobstructed path by which it can beremoved from, or installed in, the primary cleanspace in which thetool's port operates (a property referred to as “unobstructedremovability”). In particular, each tool has an essentially straightpath by which it can be installed or removed, without encounteringeither significant structural components of the fab or the bodies ofother tools. To the extent a tool body is located exterior to the outerwall of the primary cleanspace, in which its port operates, unobstructedremovability can be enhanced. This exterior location of the tool bodycan be a significant advantage over current ballroom fab designs wherethe entire tool resides in the primary cleanroom.

Unobstructed removability can offer at the least the following advantagewhen removing a tool from the manufacturing line: the fab operations inthe region of the tool need only be stopped, if at all, during therelatively brief time period when the tool is removed and a replacementtool is installed. The removed tool can then be serviced at a locationoutside the fab, with the replacement tool taking over the productionrequirements. Reasons for removing a tool from a fab can include thefollowing: the tool is malfunctioning or the tool needs maintenance.

In contrast, in a ballroom, the time needed to remove a tool istypically so long that it may be preferable to service the tool insidethe ballroom. In this scenario, operations of the fab related to thetool to be serviced are interrupted during the entire period of thetool's servicing. The greater time required to remove a tool from aballroom can be due to a need for disassembly of the tool, into smallsub-units, before it is capable of passing-through cleanroom accesspoints.

In addition, to the extent the body of each tool is located exterior tothe primary cleanspace, the volume of the primary cleanspace can bereduced. The primary cleanspace can be reduced to a minimum size, withrespect to serving the space needs of the tools, if only the tool portsare located in the primary cleanspace. In this case, the primarycleanspace only needs to provide for material transport. Space formaterial transport can be further reduced if only robotics is used(robotics are discussed in the following section “Robotics andLogistics”). Minimizing the space for material transport can minimizethe technical and economic requirements for establishing unidirectionalflow and adequate cleanliness.

A primary cleanspace designed in accordance with the general layout 314of FIG. 3, permits the establishment of unidirectional air flow evenwhen the density of tool placement, per unit area of cleanspace wall, isextremely high. Denser tool placement, when it does not impair clean airflow, provides economic advantages. For example, denser tool placementcan permit the overall size of a cleanspace-assisted manufacturingfacility to be reduced.

A fabricator, constructed in accordance with FIG. 4A, can be located ina building constructed according to a standard “open” design.

However, rather than using a lattice as the support structure, anotherpossibility is to use a building with multiple floors where each floorhas a circular opening or “cutout.” The cutouts can be concentric, butseparated from each other, in the “Z” (or height) axis. As an example,each of shelves 401 to 405 of FIG. 4A can be replaced by a floor with acircular cutout.

2.2. Robotics and Logistics

Compared with the robotics needed for conventional ballroom cleanrooms,fabs designed in accordance with the present invention can utilizehighly simplified robotics.

A fab designed in accordance with round annular tube 314 of FIG. 3, forexample, can have material transport within its primary cleanspacesupported by simplified robotics. In a primary cleanspace of suchgeometry, that approximates a curved two-dimensional space, a robotneeds only two degrees of gross movement capability. Gross movements canbe specified in terms of cylindrical coordinates: a rotation angleinside the circular space and a height coordinate.

FIG. 7 shows an example of how robots can be located in the primarycleanspace of a round tubular annular fab. FIG. 7 presents a closer viewof the top level of the embodiment of FIG. 4A. FIG. 7 shows an examplerobot 719. Robot 719 is located inside the primary cleanspace. FIG. 7happens to show the current location of robot 719 as being the top levelof the fab.

A robot can achieve a rotation angle with a circular rail 720. A heightcoordinate can be achieved by providing vertical rails with elevationcapabilities. An example vertical rail 721 is indicated. An example toolport 711 is indicated. Gross robotic movements accomplish the transportof jobs from one tool port to another.

Redundant robotics equipment can be desirable so that, in the case ofonly some robots malfunctioning or needing servicing, transportation ofjobs can continue. One pair of robots is shown schematically as robots719 and 722 in FIG. 7. A second level of such robots can be provided aswell. For example, FIG. 5 depicts two pairs of robotic manipulators.Robots 719 and 722 of FIG. 7 are shown, along with their circular rail720 for angular rotation. The combination of a pair of robots and itscircular rail shall be referred to herein as a “platform.” FIG. 5 alsoshows a second platform comprised of robots 519 and 520. For purposes ofillustration, it is assumed that the second platform is vertically belowthe first platform. Therefore, the circular rail of the second platformcannot be seen in the top view of FIG. 5. Both the first and secondplatforms can share the vertical rails. For example, both the first andsecond platforms can share vertical rail 721 that is indicated in bothFIGS. 5 and 7. (FIG. 4A indicates a rail 413 that corresponds to rail721.)

The first and second platforms can be utilized as follows. The secondplatform can have primary responsibility for transporting jobs betweentools located in the lower half of fab levels. The first platform canhave primary responsibility for transporting jobs between tools locatedin the upper half of fab levels.

In the event a platform suffers a malfunction (or needs servicing), thefollowing steps can be taken. The platform to be taken out of servicecan move to its “rest” or maintenance location at the appropriate end ofthe tubular space: the second platform can have a maintenance locationat the bottom of the tubular space, the first platform can have amaintenance location at the top of the tubular space. The platform thatis still operating can traverse all fab levels, enabling the fabricatorto continue operating, albeit with lower throughput.

The logistics of transport between tools can also be simplified,compared to known approaches to cleanroom design, since job transportcan occur with a “fluid” motion that combines varying the two grossdegrees of freedom, angle and height, simultaneously. In contrast, a“classic” ballroom approach to cleanroom design uses multiple tracks andhandoffs, often over large distances.

FIGS. 11A, 11B and 11C are provided to further understanding of thedifferences, in material logistics, between a ballroom type fab and around tubular annular fab. While FIG. 11A shows a ballroom type fab andFIG. 11C shows a round tubular annular fab, both figures depict the sametype of generic transfer of a job from a tool 1110 to a tool 1111. Tool1110 is representative of any first tool type and tool 1111 isrepresentative of any other second tool type.

2.2.1. Ballroom Inter-Tool Job Transfer

FIG. 11A presents a top view of the fab shown in elevation in FIG. 1Aand in cross-section in FIG. 1B. FIG. 11A places the ballroom within Xand Y axes. A space between the tools that permits for job movementprimarily along the Y-axis is referred to as a “column-aisle” while aspace between the tools that permits for job movement primarily alongthe X-axis is referred to as a “row-aisle.”

In a ballroom type fab, a job travels as follows (please see FIG. 11Aand highlighted regions identified by circles 1150 and 1151 in FIG.11B).

A job is transported out of the inner processing chambers of tool 1110and to the tool's port. In the detailed view of FIG. 2, this correspondsto a job emerging from the body of tool 210 (with tool 210 representingtool 1110 at this point in the example) and appearing at port 216.

The job travels vertically to the ballroom ceiling. In FIG. 11B, suchvertical travel occurs at numeral 1140. In the detailed view of FIG. 2,this corresponds to job 213 traveling on vertical portion 219 of theintermediate rail.

The job then changes from the vertical intermediate rail to thehorizontal intermediate rail. In the detailed view of FIG. 2, thiscorresponds to job 213 changing from its vertical intermediate rail 219to horizontal intermediate rail 218.

The job then moves along the horizontal direction towards a majorrow-aisle rail. In FIG. 11B, such movement is indicated by numeral 1129.In FIG. 2, such movement corresponds to a job moving along horizontalportion 218 of the intermediate rail towards overhead rail 215.

The job changes tracks to a major row-aisle rail. In FIG. 11B, thistrack change point is indicated by numeral 1130 while in FIG. 2 itcorresponds to a job changing from the intermediate rail to overheadrail 215.

The job moves along a row-aisle rail towards a column-aisle rail (suchmovement along the row-aisle rail is indicated by numeral 1131 in FIG.11A).

At the point indicated by numeral 1142, there is a track change from therow-aisle overhead rail to a column-aisle overhead rail.

The job moves along a column-aisle rail towards a second row-aisle rail(such movement along the column-aisle rail is indicated by numeral 1132in FIG. 11A).

When the job reaches the row-aisle where tool 1111 is located, there isa track change at the point indicated by numeral 1143. The track changeis from a column-aisle overhead rail to a second row-aisle rail.

The job travels across the second row-aisle rail until the location oftool 1111 is reached (such movement along the second row-aisle rail isindicated by numeral 1133). In the detail of FIG. 2, with tool 210 nowregarded for purposes of example as tool 1111, this corresponds to job214, on overhead row-aisle rail 215, reaching intermediate rail 218.

At a point indicated in FIG. 11B by numeral 1134, the job changes tracksfrom the second row-aisle rail to the intermediate rail. In the detailof FIG. 2, this corresponds to job 214 moving from overhead row-aislerail 215 to horizontal portion 218 of the intermediate rail.

The job moves along the horizontal portion of the intermediate railtowards the vertical portion of the intermediate rail. Such movement isindicated in FIG. 11B by numeral 1135. In the detail of FIG. 2, thiscorresponds to the job moving along horizontal portion 218 of theintermediate rail towards vertical portion 219 of the intermediate rail.

At a point indicated in FIG. 11B by numeral 1145, the rail on which thejob is traveling changes to being in the vertical direction. In thedetail of FIG. 2, this corresponds to the job moving from the horizontalportion of the intermediate rail to its vertical portion 219.

At a point indicated in FIG. 11B by numeral 1145, the job movesvertically downwards, on the intermediate rail, towards the port fortool 1111. In the detail of FIG. 2, this corresponds to job 213 movingdownwards on vertical portion 219 of the intermediate rail towards port216.

At a point indicated in FIG. 11B by numeral 1145, the job is accepted bythe port of tool 1111 and enters interior chambers of tool 1111 in orderto accomplish the next step in a process.

2.2.2. Round Tubular Annular Fab Inter-Tool Job Transfer

In FIG. 11C, drawings 1102, 1103 and 1104 are used to show how theequivalent movement of a job, from a tool 1110 to a tool 1111, can occurin the primary cleanspace of a tubular fab.

Elevation view 1102 depicts the location of tool 1110 at the lowestlevel (referred to in FIG. 4A as level 405). Top view 1103 shows therotational location of tool 1110 at a position 1136. Elevation view 1102depicts the location of tool 1111 at the highest level (referred to inFIG. 4A as level 401). Top view 1103 shows the rotational location oftool 1111 at a position 1138.

The example job transfer begins with a robot being located at tool 1110.

The robot picks-up the job from the port of tool 1110 (such picking upoccurs at location 1136).

The robot moves from the lowest level 405 to highest level 401 (suchmovement indicated by arrow 1137 in drawing 1104). Simultaneously withthe robot moving vertically to change levels, it can also moverotationally (e.g., on an automation platform with a pair of robots)from location 1136 to 1138. Once at tool 1111, the robot can “hand-off”the job to the port of tool 1111 (such hand-off indicated by numeral1139 in drawing 1102).

2.3. Including a Secondary Cleanspace

In the round tubular annular fab designs discussed thus far, while toolports are located in a primary cleanspace, tool bodies are placed in anunspecified environment that can be clean or not.

Location of the tool bodies in a secondary cleanspace can beaccomplished as follows. FIGS. 9A and 9B depict a fab similar to that ofFIG. 4A, except that an exterior boundary wall 942 has been added. FIG.9A shows an elevation view while FIG. 9B shows a top view in order toemphasize an example unidirectional air flow that could be set up.

As can be seen, boundary wall 942 permits the establishment of asecondary cleanspace wherein the tool bodies reside. The environmentexterior to wall 942, whose cleanliness level is undefined, shall bereferred to herein as the exterior environment. As with the innermostcleanroom wall 410, the unidirectional flow of FIG. 9B can be achievedby constructing wall 942 with perforated material to allow for theexhaust of the unidirectional air flow through such wall. As with wall410, wall 942 can also be constructed of panels that include theperforated material and ducting.

A second set of HEPA Filters can located on the same boundary wall 409where the HEPA filters for the primary cleanspace are located. However,unlike the first set of HEPA filters that point towards wall 410, thesecond set of HEPA filters can point towards wall 942. FIGS. 9A and 9Bindicate a tool 420, as was discussed above with respect to FIG. 4A. Ascan be seen, rather than existing in an environment of unspecifiedcleanliness, the body of tool 420 is shown as being in the secondarycleanspace established by walls 409 and 942.

Another example air flow for FIG. 9B is as follows. The air flow betweenthe primary and secondary cleanspaces can be arranged such that theoutput air from the primary cleanspace becomes the input air for thesecondary cleanspace. In FIG. 9B, this can be accomplished by reversingthe air flow in the primary cleanspace such that it enters the primarycleanspace from wall 410 and exits the primary cleanspace through wall409. The air that exits the primary cleanspace through wall 409 can beinput into the second set of HEPA filters that points towards wall 942.With respect to the primary cleanspace, wall 409 acts as an airreceiving wall. With respect to the secondary cleanspace, wall 409 actsas an air source wall.

The cleanliness requirements of the secondary cleanspace can bedifferent than the primary cleanspace. Typically, the secondarycleanspace can have less stringent cleanliness requirements. Suchdifferences, in the standard of cleanliness needed, can result indifferences in at least the following: number of filter elements arrayedand air flow through such filter elements.

In an embodiment according to FIG. 9A, there can be a sealing surface onthe body of the tool where it intersects wall 942. For example, FIG. 9Aindicates a tool body 947 that intersects with wall 942 though a square“cut out” of wall 942. The intersection of tool body 947 with wall 942is indicated by numeral 950. The intersection can be constructed topermit relatively simple and fast removal of a tool (and therebypreserve the property of unobstructed removability). When removing atool from its secondary cleanspace, steps can be taken to provide atemporary means of isolating the secondary cleanspace from the externalenvironment.

2.4. Utilities Support

A functioning fabricator also has the requirements of utility support.The location of tool bodies, external to the primary cleanspace, canmake utility support easier to provide. One possible way to routeutilities is to use a dedicated location along the exterior of theprimary cleanspace's outer wall. For example, FIG. 4A indicates alocation 408 where utilities a routed along the vertical or “Z” axis ofthe fabricator.

Utilities that can be routed at location 408 include electricity.Electrical support conduits can be installed at location 408 along the“Z” axis. At each level, the wiring held in the electrical conduits canfan out to the equipment (e.g., tools) where electrical power is needed.At each level, appropriate control systems, breaker boxes, andmonitoring equipment can be provided for the tooling supplied withelectrical power.

To support a tool located on a level “n,” electrical conduit also can berouted rotationally. Rotationally routed conduit, for providingutilities to equipment at a level “n,” can be routed on the underside ofthe shelf forming the level n-1, where level n-1 is defined to be thenext vertically higher shelf than “n.” For example, in FIG. 4A, a toollocated on level 404 can be supported by conduit routed on the undersideof the shelf forming level 403.

While the above discussion has focused on the routing of electricity,other utilities (such as gasses, chemicals and exhaust systems) can berouted in a similar fashion.

While the above discussion has focused upon routing utilities along a“Z” axis, followed by rotational routing, any other form of utilityrouting can be used.

For example, utilities can be routed directly to a level of thefabricator, from a source location exterior to the fabricator, withoutrouting along the “Z” axis being used.

2.5. Construction Advantages

An advantage realized with the multilevel aspect of the round tubularfab is during its construction or “build.” Lessening the time of a fab'sbuild can provide significant economic advantages.

FIG. 12 depicts each level of a fab as being constructed of two types ofsub-units. Examples of a first type of sub-unit are indicated in FIG. 12by numerals 1211 and 1210. An example of a second type of sub-unit isindicated in FIG. 12 by numeral 1212. Multiple copies, of each type ofsub-unit, can be prefabricated (i.e., built in advance of a particularfab's construction).

The first type of sub-unit can comprise parts of the fab from the outerwall of the primary cleanspace (e.g., wall 409 of FIG. 4A) andproceeding outwards. Therefore in a fab constructed in accordance withFIG. 4A, such first type of sub-unit can also comprise (in addition towall 409), a shelf and tools mounted on such shelf. The outer wall ofthe primary cleanspace, in a first type of sub-unit, can be comprised ofpanels 822 as shown in FIG. 8B.

The second type of sub-unit can comprise parts of the fab from the innerwall of the primary cleanspace (e.g., wall 410 of FIG. 4A) andproceeding inwards.

As shown in FIG. 12, the assembly of a fab can be performed, on-site, byplacing such fab sub-units on top of each other. If the fab sub-unitsare large, a crane can be used for hoisting such fab sub-units intoplace.

Once the fab sub-units are in place, tool “fit up” and installation canbe easier and faster, with respect to conventional cleanroom designs,since all tools can be located on the periphery.

Utilization of the above-two types of sub-units is just an example of aprefabrication strategy. Any appropriate unit of a fab can be chosen forprefabrication. For example, each level of a fab can be prefabricated asa single unit. As another example, any suitable portion of a singlelevel of a fab can be prefabricated.

In addition to assisting in the initial “build” of a fab, prefabricatedunits can be used in the maintenance or repair of a fab.

3. ALTERNATE EMBODIMENTS 3.1. Overview

When constructing a fab in accordance with teachings of the presentinvention, there are other shapes, besides the round annular tubularshape 314 of FIG. 3, that can be used.

Another shape, depicted in FIG. 3, is rectangular annular tubular shape313. A fab, constructed in accordance with shape 313, is discussed inthe below section “Rectangular Tubular Annular Fab.”

In general, the round annular tubular shape and the rectangular annulartubular shape can be viewed as specific instances of the technique ofcurving or folding the conventional planar ballroom cleanroom in orderto produce a primary cleanspace. This curving or folding technique canbe applied to produce numerous alternative shapes to the types focusedon herein. For purposes of example, and without limitation, these shapescan include non-annular tubes (e.g., in FIG. 3, round tube 310 andsquare tube 311), spheres, hemispheres and pyramids.

One skilled in the area of conventional fabricator design can readilyappreciate how the techniques presented herein can be applied to othercleanspace geometries. For each alternative geometry, it can be viewedas defining the shape of a primary cleanspace wall. Tools can be arrayedat peripheral locations of the primary cleanspace defined with suchprimary cleanspace wall. Internal to the primary cleanspace wall can belogistics handling equipment (e.g., robots). Based upon the abovediscussion of a round tubular annular fab, it can readily be appreciatedhow the property of unobstructed removability can be preserved withthese other geometries. Also, based upon the above discussion of a roundtubular annular fab, it can readily be appreciated how the technique ofprefabrication can be applied to other geometries.

Examples, of how the techniques presented herein can be applied to othercleanspace geometries, are discussed below. These example geometries areas follows: tube 310 (see “Round Tubular Non-annular Fab”), annular tube313 (“Rectangular Tubular Annular Fab”) and a section of annular tube314 or 313 (“Section of a Tubular Annular Fab”).

3.2. Round Tubular Non-annular Fab

The round tubular non-annular fab (FIG. 3, item 310) can be related tothe round tubular annular fab as follows. A round tubular fab, withoutan annular region, is depicted in FIG. 4B. There are many similaritiesof this fab design to the previously discussed round tubular annularfab, as can be seen by the commonly numbered elements in FIGS. 4A and4B. Tools are arranged at peripheral locations of the cleanspace,preserving the property of unobstructed removability. The fabricator ofFIG. 4B, being divided into levels like those of FIG. 4A, providessimilar opportunities (as discussed above in section 2.5 “ConstructionAdvantages”) for using prefabricated units in its construction, repairor maintenance. The distances involved, for logistics handling equipmentinside the tube, can be compressed (compared with a conventionalballroom cleanroom) by the geometries of the cleanspace.

Technical difficulties of a round tubular non-annular fab, compared withthe annular version, can include the following. The establishment of aunidirectional air flow can be more difficult. The primary cleanspacevolume may need to be larger, compared to an annular version ofcomparable overall dimensions.

Unidirectional air flow can be directed perpendicularly to the “Z” axisof the tube (an XYZ axis is indicated in FIG. 4B by numeral 450). A topview of the air flow thus derived is depicted in FIG. 6B. Such air flowmay not be as uniform as in the annular example. This can result inports on the input side of the air flow operating within a primarycleanspace of a higher cleanliness class than the ports operating on theexit side.

Alternatively, unidirectional air flow can be established parallel tothe tube's “Z” axis. As the length of the tube along the “Z” dimensionis increased, however, the need for increased air flow velocity, tomaintain unidirectionality, can erode economic gains due to the fab'sdecreased cleanspace volume when compared with conventional cleanrooms.A solution to this problem can be providing individual air flow systemsat each level of the fab. This type of solution is depicted in FIG. 6C,where the levels are indicated by numerals 601, 602, 603, 604 and 605.As shown in FIG. 6C for level 604, each level can serve two functions:with respect to the level below (e.g., with respect to level 605) aircan flow out of “ceiling type” HEPA Panels (indicated by numeral 662)and, with respect to the level above (e.g., with respect to level 603)air can exhaust down into perforated flooring (indicated by 661). Such asolution requires an ability to transport a job from being between onepair of levels (or within a first air flow system) to being betweenanother pair of levels (or within a second air flow system). Theapproach depicted in FIG. 6C, indicated by numeral 660, is to provide anopening in the center of each of the cleanspace level separators. Itshould be apparent, however, that the flexibility of job logisticsinside the cleanspace can be constrained by such a solution.

3.3. Rectangular Tubular Annular Fab

FIG. 3 depicts an annular tubular shape 313 of rectangular cross section(i.e., a rectangular annular tube). It is comprised of an outer tube 323and an inner tube 322, where 322 defines the annular region. In a roundtubular annular fab, constructed according to shape 313, the primarycleanspace is located in-between the inner and outer tubes.

FIG. 13 shows an elevation view of a fab embodiment in accordance withthe rectangular annular tubular shape 313 of FIG. 3. There are the manysimilarities between the fab designs of FIG. 13 and FIG. 4A. An XYZ axis1350 is in the same orientation, relative to the fabricator of FIG. 13,as XYZ axis 450 is with respect to the fabricator of FIG. 4A.

To facilitate comparison of FIG. 13 with FIG. 4A, the fab of FIG. 13also has 5 levels. Wall 1340 of FIG. 13 corresponds to wall 409 of FIG.4A, since both serve the function of being air source walls. Wall 1343of FIG. 13 corresponds to wall 410 of FIG. 4A, since both serve thefunction of being air receiving walls. In a similar manner to FIG. 4A,the tools are located at locations peripheral to the primary cleanspaceand are organized according to levels on shelving-type supports. Theperipheral locations of the tool bodies (in this case, their locationaround the exterior of wall 1340), tends to preserve the property ofunobstructed removability. The fabricator of FIG. 13, being divided intolevels like those of FIG. 4A, provides similar opportunities (asdiscussed above in section 2.5 “Construction Advantages”) for usingprefabricated units in its construction, repair or maintenance. Tworobotic platforms, each similar to the robotic platform of FIG. 7 (i.e.,rail 720 and robot pair 719 and 722), can be provided. Shown, in FIG.13, is a rail 1342 that corresponds to robotics rail 720 of FIG. 7.Tools 420, 421 and 422 of FIG. 4A are placed in similar locations inFIG. 13.

Some differences between FIGS. 4 and 13 are as follows.

The support shelves are straight, rather than curved. For example, anexterior wall for the primary cleanspace of FIG. 13 is indicated bynumeral 1340. Wall 1340, in contrast to wall 409 of FIG. 4, provides aflat surface against which the bodies of tools can be placed. Wall 1340can, with respect to wall 409, provide simplified placement of tools andthe delivery of utilities.

Unlike a round tube, a rectangular tube has corners (i.e., limitedregions where the curvature changes). The corners can cause turbulencein the air flow. The design of FIG. 13 shows rounded corners (e.g., seerounded corner 1341) intended to lessen turbulence.

The robotics system displayed in FIG. 13 (e.g., see rail 1343) issimilar to the robotics of the round tubular annular fab, but somedifferences are as follows. The rails used to locate a job in thehorizontal plane, rather than being round, assume a shape similar tothat of the rectangular cross-section of FIG. 13 (i.e., it can be anapproximately rectangular shape composed of straight sides joined byrounded corners). Other than this shape difference, the function of therobotics can be equivalent to that of the round tubular annular fabrobotics (such as was discussed above with respect to FIG. 7).

In an analogous fashion to the round tubular annular fab, an outer wallcan be added to a rectangular tubular annual fab to form a secondarycleanspace for the tool bodies. This design is depicted in FIG. 14,where outer peripheral wall 1442 corresponds to outer peripheral wall942 of FIGS. 9A and 9B.

FIG. 15A depicts an example air flow, perpendicular to the “Z” axis ofFIG. 13, that is within the single primary cleanspace. FIG. 15Acorresponds to the example air flow for FIG. 4A that is shown in FIG.6A. FIG. 15B depicts an example air flow for the design of FIG. 14 whichhas primary and secondary cleanspaces. FIG. 15B corresponds to theexample air flow for FIG. 9A that is shown in FIG. 9B.

As discussed above with respect to FIG. 4A, any of walls 1340, 1343 and1442 can be constructed of panels. Further, air flow within a cleanspacecan be reversed by reversing, with respect to the cleanspace, which wallserves the function of air source wall and which serves the function ofair receiving wall.

3.4. Section of a Tubular Annular Fab

A variation, on the tubular annular fab, either round or rectangular,can be created by “cutting” (or sectioning) off a portion of the fabalong a cut line. The selection of an appropriate cut line (or lines)can be guided by various considerations, including its effect on thecomplexity of transport automation.

Greater access to the annular region, of either the round tubularannular fabs (e.g., FIG. 4A) or the rectangular tubular annular fabs(e.g., FIG. 13), can be effected by the following sectionalizations. Theannular tube shape can be bisected with a cut line. Alternatively, twocut lines can be used to remove a “slice” (e.g., one quarter) of anannular tubular shape. Such greater access can enhance the annularregion as a location for tool bodies. All the tool bodies of a fab canbe located within the annular region, or some tool bodies can be locatedwithin the annular region and others can be located outside the exteriorprimary cleanspace wall.

An example sectionalization, that can be served by relatively simpletransport automation, results from application of the following cut lineto a rectangular tubular annular fab: a cut line that lies on onestraight side of the annular region that defines the inner wall of theprimary cleanspace. The fab thus formed is, essentially, a one-quartersection of a rectangular tubular annular fab (referred to herein as a“one-quarter rectangular tubular annular fab”). An example of this typeof fab is shown in FIG. 16 and the one-quarter rectangular tubularannular fab is discussed further below.

In general, however, while a section of a tubular annular fab may nolonger have a curved primary cleanspace, a novel fabricator can still berealized if it has at least one of the following two configurations.

A first configuration is that tools of the fabricator be stacked, one ontop of the other, according to a vertical dimension (i.e., along adimension substantially parallel to gravity). While not necessary, animportant additional improvement, for the first configuration, is thateach tool body of the fabricator be placed at a peripheral location ofthe primary cleanspace.

The second configuration is a combination of the fabricator's primarycleanspace being nonsegmented and having the tool bodies at peripherallocations of the primary cleanspace where at least a portion of the toolbodies are outside the primary cleanspace.

Other than the fact that a section has been taken of a tubular annularfab, a section of a tubular annular fab can be constructed in,essentially, the same way that a non-sectioned tubular annular fab isconstructed.

Sectional tubular annular fabs share advantages in common withnon-sectional tubular annular fabs. Dense tool placement is enabled.Primary cleanroom space can be reduced to the minimum required fortransport automation. In the case of sectional rectangular tubularannular fabs, the same linear placement of tools along the outer wall ofthe primary cleanspace, as in a rectangular tubular annular fab, can beutilized.

The one-quarter rectangular tubular annular fab of FIG. 16 shares manydesign aspects with the tubular annular fabs discussed above. Forexample, levels 1601 to 1605 of FIG. 16 correspond to levels 401 to 405of FIG. 4A. Vertical support member 1607 of FIG. 16 corresponds tovertical support member 407 of FIG. 4A. Primary cleanspace walls 1609and 1610 correspond to, respectively, primary cleanspace walls 409 and410 of FIG. 4A. Vertical, or “Z” axis, utilities routing at 1608corresponds to location 408 of FIG. 4A (an XYZ axis is indicated in FIG.16 by numeral 1650). Standard ducting 1612, that can convey the exhaustair back to the air flow fans, corresponds to ducting 412 of FIG. 4A.

The location of the tool bodies, along the periphery of wall 1609, tendsto preserve the property of unobstructed removability. The fabricator ofFIG. 16, being divided into levels like those of FIG. 4A, providessimilar opportunities (as discussed above in section 2.5 “ConstructionAdvantages”) for using prefabricated units in its construction, repairor maintenance.

As with the tubular annular fabs, where either or both walls of theprimary cleanspace can have tool bodies, the one-quarter rectangulartubular annular fab (e.g., FIG. 16) can have tool bodies located on twofacing cleanspace walls (e.g., on walls 1609 and 1610).

The planar aspect of the cleanspace of FIG. 16 does allow for alternatetypes of robotic design.

FIG. 17 depicts an example alternate robotics implementation. In FIG. 17the primary cleanspace walls 1609 and 1610 have been removed so that therobotics, and its operation, can be more readily appreciated. Therobotics shown achieves gross movement in two orthogonal dimensions(depicted in the drawing as Cartesian axes “X” and “Z”). The roboticsassembly shown can be assembled from standard materials with a frame oflinear rails (1743) providing the “Z” direction. The rail for movementalong the “X” direction (1745) can ride on linear bearings (1744) alongthe “Z” direction rails. A robot (1746) can ride along the “X” directionrail. As in the previous logistics discussion, the robot can transportjobs between standard tool ports, an example of which is designated aport 1711 of a tool 1706.

The construction of HEPA filter panels, for the embodiment of FIG. 16,can be accomplished in an equivalent fashion to that previouslydiscussed with reference to FIGS. 8B-8C. The HEPA filter panels can beincorporated in wall 1609, that forms the boundary between the toolbodies and the primary cleanspace. Unlike FIG. 8A, where the HEPA filterpanels are used to form a , in FIG. 16 wall 1609 is planar. These HEPAfilter panels can be placed, in forming wall 1609, such that aunidirectional air flow can be established. An example unidirectionalair flow for the fab of FIG. 16 (that is perpendicular to the “Z” axisof FIG. 16) is shown in FIG. 18.

FIG. 19 depicts the addition of a boundary wall 1942 to establish asecondary cleanspace for the tool bodies. Boundary wall 1942 correspondsto boundary wall 942 of FIGS. 9A-9B. Wall 1942 can allow forunidirectional air flow, across the tool bodies, in a directionindependent of the primary cleanspace. Example unidirectional flows(perpendicular to the “Z” axis of FIG. 19), for the primary andsecondary cleanspaces, are depicted in FIG. 20.

Another example air flow for FIG. 20 is as follows. As discussed abovefor FIG. 9B, the air flow between the primary and secondary cleanspacescan be arranged such that the output air from the primary cleanspacebecomes the input air for the secondary cleanspace. In FIG. 20, this canbe accomplished by reversing the air flow in the primary cleanspace suchthat it enters the primary cleanspace from wall 1610 and exits theprimary cleanspace through wall 1609. The air that exits the primarycleanspace through wall 1609 can be input into the second set of HEPAfilters that points towards wall 1942. With respect to the primarycleanspace, wall 1609 acts as an air receiving wall. With respect to thesecondary cleanspace, wall 1609 acts as an air source wall.

FIG. 19 also shows tool bodies (e.g., tool body 1947), that canintersect exterior wall 1942 of the secondary cleanspace in the same waythat tool bodies intersect wall 942 of FIG. 9A, except that wall 1942 isplanar while wall 942 is curved.

The intersection of tool body 1947 with wall 1942 is indicated bynumeral 1950. This corresponds, in FIG. 9A, to the intersection of toolbody 947 with wall 942, as indicated by numeral 950. As withintersection 950, intersection 1950 can be constructed to permitrelatively simple and fast removal of a tool.

As discussed above with respect to FIGS. 4A and 13, any of walls 1609,1510 and 1942 can be constructed of panels. Further, air flow within acleanspace can be reversed by reversing, with respect to the cleanspace,which wall serves the function of air source wall and which serves thefunction of air receiving wall.

4. SCALING ISSUES

An inventive cleanspace-assisted fabricator, as described above, can bescaled larger or smaller depending upon the particular needs of thefabricator's users. For example, the number or length of the shelves,upon which tools can be placed, can be scaled larger or smaller. Thedistance between shelves can be scaled larger or smaller depending onthe size of tool to be supported. Increasing the number of tools for afab can be a result of desiring greater throughput for a particularprocess, or it can be the result of needing to support a more complexprocess. Increasing the size of the tools for a fab can be a result ofdesiring an ability to manufacture larger items (e.g., a desire toprocess wafers, in a semiconductor process, of larger diameter) or itcan be a result of desiring greater throughput.

As an alternative, or as an addition, to scaling a fab, multiple copiesof a fab can be coupled together to produce a facility that, overall,provides greater throughput. For example, as shown in FIG. 21, sixinstances (2110-2115), of a one-quarter rectangular tubular annular fab,have been coupled together according to a placement similar to theplacement of shelves in a library. Numeral 2148 indicates an externalrail system that could be used to couple the six fabs and provide formaterial transport between them. Numeral 2149 indicates an interfaceunit between external rail system 2148 and the robotics of oneparticular fab. While FIG. 21 shows the coupling of one-quarter sectionsof a rectangular tubular annular fab, it can readily be appreciated thatany embodiment of the invention, as discussed above, can be coupledtogether in a similar fashion.

The cleanspace fabricator designs presented herein can be scaled down toconstruct fabrication facilities (referred to herein as a “minifab”) ofa size that would typically be considered impractical for conventionalfab designs. For example, a minifab can be constructed that uses aminimal number of tools for implementation of a process (e.g., one toolfor each tool type).

A minifab can run an entire process, but with smaller throughput than istypical of conventional large-scale fabs. Despite the small throughput,a minifab in accordance with the present invention can still be expectedto provide a sufficiently small operating cost to make it viable foruses such as prototyping or maskless lithography.

The costs associated with a minifab can be reduced, for example, by theunobstructed removability of its tools. A tool needing repair (or otherservicing) can be easily replaced by relatively unskilled personnel. Thetool to be serviced can then be “sent out” for such servicing. Forexample, the tool needing service can be sent out for repair by a partyother than the party that owns or operates the minifab. Centralizedpooling of the repair function can permit the cost, per repair, to bereduced.

In contrast, with a ballroom type fab, the cost of removing a tool fromthe fab can be higher than the savings in repair cost gained bytransporting the malfunctioning tool to a centralized pooling of therepair function.

5. COMPLETING A FABRICATOR

The above-described cleanspace fabricators can be accomplished withrelatively minor adaptations of known components and materials.

For example, conventional tools, that can be used in a conventionalballroom cleanroom, can be incorporated, with little or no modification,into the above-described inventive cleanspace fabricator designs.

Walling materials, HEPA filters, and other similar structural materials,that are in standard practice today, can be readily adapted to form thenovel cleanspace fabricators presented herein.

Systems for temperature and humidity control, unidirectional air flow,provision of chemicals, provision of gases and other similar suchutilities, that are in standard practice today, can be readily adaptedto form the novel cleanspace fabricators presented herein.

Similarly, automation equipment, that is in standard practice today, canbe readily adapted to form the novel cleanspace fabricators presentedherein.

The process, by which an automation system determines the next tool towhich a job should be sent, can be referred to as a “logisticshierarchy.” Only the lowest levels, of such logistics hierarchies, arespecific to the physical layout of the fab it controls. The lowestlevels comprise the means by which a job, at a physical starting toollocation, is transported to a correct next-tool physical location tocontinue a process.

Stated differently, regardless of a fab's physical layout, the higherlevels of its logistics hierarchy can still operate in the same way.

Thus, to adapt a logistics hierarchy to a particular fab's physicalrealization, one need only solve the following control issue: thetransfer of a job from one arbitrary physical tool location of the fabto any other arbitrary physical tool location of the fab. Once thiscontrol issue is solved, any manufacturing process can be readilyadapted to the cleanspace fabricator.

FIG. 22 shows an example logistics hierarchy. At the top level of FIG.22 is a determination of the current step, in the process, where the jobis located. This current step is referred to in FIG. 22 as “Step 1.” Thesecond level of FIG. 22 is a determination of the next process step(referred to as “Step 2”). The third level of FIG. 22 is a determinationof the tool type upon which Step 2 can be accomplished (the tool typereferred to as “Beta”). The fourth level of FIG. 22 is a determinationof a particular tool (referred to as “Tool #2”) of type Beta upon whichStep 2 can be accomplished. The fifth level of FIG. 22 is the physicalmovement of the job from a Tool #1 to a Tool #2. Only the fifth level ofFIG. 22 is specific to the fab's physical layout.

6. CONCISE FORMULATIONS OF THE INVENTION

Based upon the foregoing description, and in conjunction with the belowGlossary, the following are some concise formulations of the invention.The below formulations are divided into three categories: ways ofconstructing a fabricator (section 6.1), fabricator constructions(section 6.2) and ways to process jobs in a fabricator (section 6.3).

6.1. Ways to Construct a Fabricator

The invention can be described as a first method for constructing acleanspace fabricator. This first method can comprise the followingsteps:

forming a first cleanspace that is folded along at least one dimension;and

placing a plurality of tools such that material to be processed by theplurality of tools can be transferred from a first tool to a second toolthrough the first cleanspace.

In the above-described first method, the plurality of tools can be forprocessing substrates.

In the above-described first method, the first cleanspace can be foldedto close upon itself.

In the above-described first method, a tool body can be placed, withrespect to a boundary of the first cleanspace, interior to saidboundary.

In the above-described first method, a tool body can be placed, withrespect to a boundary of the first cleanspace, exterior to saidboundary.

In the above-described first method, a tool body can be placed, withrespect to a boundary of the first cleanspace, intersecting saidboundary.

For the above-described first method, the method can further comprisethe following step: forming the first cleanspace and the plurality oftools such that, for each tool, there is an unobstructed path by whichit can be removed from the fabricator.

For the above-described first method, the method can further comprisethe following step: adding automation for transporting material, withinthe first cleanspace, from the first tool to the second tool. The methoddescribed by this paragraph can be referred to as a second method.

For the above-described second method, the method can further comprisethe following step: adding automation having two degrees of grossmovement capability. The method described by this paragraph can bereferred to as a third method.

For the above-described third method, the method can further comprisethe following step: adding automation having a first degree, of grossmovement capability, that can be specified as a rotation angle. Themethod described by this paragraph can be referred to as a fourthmethod.

For the above-described fourth method, the method can further comprisethe following step: adding automation having a second degree, of grossmovement capability, that can be specified as a height coordinate. Themethod described by this paragraph can be referred to as a fifth method.

For the above-described fifth method, the method can further comprisethe following step: adding automation that can simultaneously combinevarying the first and second degrees of gross movement capability.

For the above-described second method, the method can further comprisethe following step: adding automation comprising a first platform towhich is attached a first plurality of robots. The method described bythis paragraph can be referred to as a sixth method.

For the above-described sixth method, the method can further comprisethe following step: adding automation comprising a second platform, towhich is attached a second plurality of robots, that can serve thefunction of the first platform when the first platform is not working.

For the above-described first method, the method can further comprisethe following step: forming the first cleanspace into a first tubularshape along a first axis. The method described by this paragraph can bereferred to as a seventh method.

In the above-described seventh method, a cross section of the firstcleanspace, perpendicular to the first axis, can be a closed curvilinearshape.

In the above-described seventh method, a cross section of the firstcleanspace, perpendicular to the first axis, can be a closed multifacedpolygonal shape.

For the above-described first method, the method can further comprisethe following step: providing for unidirectional air flow within thefirst cleanspace. The method described by this paragraph can be referredto as an eighth method.

For the above-described eighth method, the method can further comprisethe following step: providing for unidirectional air flow within thefirst cleanspace in segmented sections.

The above-described seventh method can further comprise the followingstep: forming the first cleanspace to surround an annular region. Themethod described by this paragraph can be referred to as a ninth method.

For the above-described ninth method, the method can further comprisethe following step: forming a second cleanspace that surrounds theannular region and shares the first axis with the first cleanspace. Themethod described by this paragraph can be referred to as a tenth method.

For the above-described tenth method, the method can further comprisethe following step: forming the second cleanspace to be adjacent to thefirst cleanspace.

For the above-described tenth method, the method can further comprisethe following step: placing the plurality of tools such that, for eachtool, its body is at least partly located in the second cleanspace.

For the above-described tenth method, the method can further comprisethe following step: providing for a first cleanliness level in the firstcleanspace that is different from a second cleanliness level in thesecond cleanspace.

For the above-described tenth method, the method can further comprisethe following step: exhausting air from the first cleanspace such thatit is a clean air input to the second cleanspace.

For the above-described first method, the method can further comprisethe following step: forming a first boundary wall, of the firstcleanspace, from a plurality of panels. The method described by thisparagraph can be referred to as an eleventh method.

In the above-described eleventh method, at least one of the plurality ofpanels can be an air source panel.

In the above-described eleventh method, at least one of the plurality ofpanels can be an air source panel and an air receiving panel.

For the above-described first method, the method can further comprisethe following step: forming the first cleanspace from prefabricatedunits.

For the above-described first method, the method can further comprisethe following steps: forming the first cleanspace from a plurality oflevels; and forming each level, of the plurality of levels, from atleast one prefabricated unit.

The invention can also be described as a method for constructing acleanspace fabricator that comprises the following steps:

forming a first cleanspace;

placing a plurality of tools such that, for each tool, its port isinside the first cleanspace and its body is at a peripheral location ofthe first cleanspace;

placing the plurality of tools such that material to be processed by theplurality of tools can be transferred from a first tool to a second toolthrough the first cleanspace; and

stacking the plurality of tools along a vertical dimension.

The invention can also be described as a method for constructing acleanspace fabricator that comprises the following steps:

forming a nonsegmented first cleanspace from at least a first boundarywall;

placing a plurality of tools such that, for each tool, its port isinside the first cleanspace and its body is at a peripheral location ofthe first cleanspace where at least a first portion of its body isoutside the cleanspace;

placing the plurality of tools such that material to be processed by theplurality of tools can be transferred from a first tool to a second toolthrough the first cleanspace.

The invention can also be described as a method for constructing acleanspace fabricator that comprises the following steps:

placing a plurality of tools such that material to be processed by theplurality of tools can be transferred from a first tool to a second toolthrough the first cleanspace; and

stacking the plurality of tools along a vertical dimension.

6.2. Fabricator Constructions

The invention can be described as a first cleanspace fabricator thatcomprises the following:

a first cleanspace that is folded along at least one dimension; and

a plurality of tools that are placed, with respect to the firstcleanspace, such that material to be processed by the plurality of toolscan be transferred from a first tool to a second tool through the firstcleanspace.

The above-described first cleanspace fabricator can further comprise thefirst cleanspace and the plurality of tools formed, such that, for eachtool, there is an unobstructed path by which it can be removed from thefabricator.

The above-described first cleanspace fabricator can further compriseautomation for material transport within the first cleanspace.

The above-described first cleanspace fabricator can further comprise thefirst cleanspace formed into a first tubular shape along a first axis.

The above-described first cleanspace fabricator can further comprise thefirst cleanspace provided with unidirectional air flow.

The above-described first cleanspace fabricator can further comprise

a second cleanspace; and

the plurality of tools placed, such that, for each tool, its body is atleast partly located in the second cleanspace.

The above-described first cleanspace fabricator can further comprise thefirst cleanspace formed from prefabricated units.

The above-described first cleanspace fabricator can further comprise

the first cleanspace formed from a plurality of levels; and

each level, of the plurality of levels, formed from at least oneprefabricated unit.

The invention can also be described as a cleanspace fabricator thatcomprises the following:

a first cleanspace formed from at least a first boundary wall;

a plurality of tools placed, such that, for each tool, its port isinside the first cleanspace and its body is at a peripheral location ofthe first cleanspace;

the plurality of tools placed, such that, material to be processed bythe plurality of tools can be transferred from a first tool to a secondtool through the first cleanspace; and

the plurality of tools stacked along a vertical dimension.

The invention can also be described as a cleanspace fabricator thatcomprises the following:

a nonsegmented first cleanspace formed from at least a first boundarywall;

a plurality of tools placed, such that, for each tool, its port isinside the first cleanspace and its body is at a peripheral location ofthe first cleanspace where at least a first portion of its body isoutside the cleanspace;

the plurality of tools placed, such that, material to be processed bythe plurality of tools can be transferred from a first tool to a secondtool through the first cleanspace.

6.3. Ways To Process Jobs

The invention can be described as a first method for cleanspacefabrication that comprises the following steps:

transferring a job from a first tool to a robot;

transporting the job in a first cleanspace that is folded along at leastone dimension; and

transferring the job from the robot to a second tool.

For the above-described first method for cleanspace fabrication, themethod can further comprise the following step: removing a third tool,from the first cleanspace, along an unobstructed path.

For the above-described first method for cleanspace fabrication, themethod can further comprise the following step: transporting the job inthe first cleanspace with two degrees of gross movement. The methoddescribed by this paragraph can be referred to as a second method forcleanspace fabrication.

For the above-described second method for cleanspace fabrication, themethod can further comprise the following step: simultaneously varyingthe two degrees of gross movement.

In the above-described first method for cleanspace fabrication, thefirst cleanspace can be formed into a first tubular shape along a firstaxis.

For the above-described first method for cleanspace fabrication, themethod can further comprise the following step: providing the firstcleanspace with unidirectional air flow. The method described by thisparagraph can be referred to as a third method for cleanspacefabrication.

For the above-described third method for cleanspace fabrication, themethod can further comprise the following step: providing a secondcleanspace with unidirectional air flow, wherein a plurality of tools isplaced in the second cleanspace such that, for each tool, its body is atleast partly located in the second cleanspace but its port is located inthe first cleanspace.

For the above-described first method for cleanspace fabrication, themethod can further comprise the following step: servicing the firstcleanspace by removing a prefabricated unit.

For the above-described first method for cleanspace fabrication, themethod can further comprise the following step: servicing the firstcleanspace by removing a prefabricated unit that is a part of a level ofthe first cleanspace.

For the above-described first method for cleanspace fabrication, themethod can further comprise the following step: servicing the firstcleanspace by removing a prefabricated unit that is a level of the firstcleanspace.

The invention can also be described as a method for cleanspacefabrication that comprises the following steps:

transferring a job from a first tool to a robot, wherein the first toolis placed such that its port is inside a first cleanspace and its bodyis at a peripheral location of the first cleanspace;

transporting the job in the first cleanspace from a first location ofthe first tool to a second location of a second tool, wherein the firsttool is stacked vertically with respect to the second tool; and

transferring the job from the robot to the second tool, wherein thesecond tool is placed such that its port is inside the first cleanspaceand its body is at a peripheral location of the first cleanspace.

The invention can also be described as a method for cleanspacefabrication that comprises the following steps:

transferring a job from a first tool to a robot, wherein the first toolis placed such that its port is inside a first cleanspace and its bodyis at a peripheral location of the first cleanspace where at least afirst portion of its body is outside the cleanspace;

transporting the job in the first cleanspace, wherein the firstcleanspace is nonsegmented; and

transferring the job from the robot to a second tool, wherein the secondtool is placed such that its port is inside the first cleanspace and itsbody is at a peripheral location of the first cleanspace where at leasta second portion of its body is outside the cleanspace.

7. GLOSSARY OF SELECTED TERMS

-   -   Air receiving wall: a boundary wall of a cleanspace that        receives air flow from the cleanspace.    -   Air source wall: a boundary wall of a cleanspace that is a        source of clean air flow into the cleanspace.    -   Annular: The space defined by the bounding of an area between        two closed shapes one of which is internal to the other.    -   Automation: The techniques and equipment used to achieve        automatic operation, control or transportation.    -   Ballroom: A large open cleanroom space devoid in large part of        support beams and walls wherein tools, equipment, operators and        production materials reside.    -   Batches: A collection of multiple substrates to be handled or        processed together as an entity    -   Boundaries: A border or limit between two distinct spaces—in        most cases herein as between two regions with different air        particulate cleanliness levels.    -   Circular: A shape that is or nearly approximates a circle.    -   Clean: A state of being free from dirt, stain, or impurities—in        most cases herein referring to the state of low airborne levels        of particulate matter and gaseous forms of contamination.    -   Cleanspace: A volume of air, separated by boundaries from        ambient air spaces, that is clean.    -   Cleanspace, Primary: A cleanspace whose function, perhaps among        other functions, is the transport of jobs between tools.    -   Cleanspace, Secondary: A cleanspace in which jobs are not        transported but which exists for other functions, for example as        where tool bodies may be located.    -   Cleanroom: A cleanspace where the boundaries are formed into the        typical aspects of a room, with walls, a ceiling and a floor.    -   Core: A segmented region of a standard cleanroom that is        maintained at a different clean level. A typical use of a core        is for locating the processing tools.    -   Ducting: Enclosed passages or channels for conveying a        substance, especially a liquid or gas—typically herein for the        conveyance of air.    -   Envelope: An enclosing structure typically forming an outer        boundary of a cleanspace.    -   Fab (or fabricator): An entity made up of tools, facilities and        a cleanspace that is used to process substrates.    -   Fit up: The process of installing into a new clean room the        processing tools and automation it is designed to contain.    -   Flange: A protruding rim, edge, rib, or collar, used to        strengthen an object, hold it in place, or attach it to another        object. Typically herein, also to seal the region around the        attachment.    -   Folding: A process of adding or changing curvature.    -   HEPA: An acronym standing for high-efficiency particulate air.        Used to define the type of filtration systems used to clean air.    -   Horizontal: A direction that is, or is close to being,        perpendicular to the direction of gravitational force.    -   Job: A collection of substrates or a single substrate that is        identified as a processing unit in a fab. This unit being        relevant to transportation from one processing tool to another.    -   Logistics: A name for the general steps involved in transporting        a job from one processing step to the next. Logistics can also        encompass defining the correct tooling to perform a processing        step and the scheduling of a processing step.    -   Multifaced: A shape having multiple faces or edges.    -   Nonsegmented Space: A space enclosed within a continuous        external boundary, where any point on the external boundary can        be connected by a straight line to any other point on the        external boundary and such connecting line would not need to        cross the external boundary defining the space.    -   Perforated: Having holes or penetrations through a surface        region. Herein, said penetrations allowing air to flow through        the surface.    -   Peripheral: Of, or relating to, a periphery.    -   Periphery: With respect to a cleanspace, refers to a location        that is on or near a boundary wall of such cleanspace. A tool        located at the periphery of a primary cleanspace can have its        body at any one of the following three positions relative to a        boundary wall of the primary cleanspace: (i) all of the body can        be located on the side of the boundary wall that is outside the        primary cleanspace, (ii) the tool body can intersect the        boundary wall or (iii) all of the tool body can be located on        the side of the boundary wall that is inside the primary        cleanspace. For all three of these positions, the tool's port is        inside the primary cleanspace. For positions (i) or (iii), the        tool body is adjacent to, or near, the boundary wall, with        nearness being a term relative to the overall dimensions of the        primary cleanspace.    -   Planar: Having a shape approximating the characteristics of a        plane.    -   Plane: A surface containing all the straight lines that connect        any two points on it.    -   Polygonal: Having the shape of a closed figure bounded by three        or more line segments    -   Process: A series of operations performed in the making or        treatment of a product—herein primarily on the performing of        said operations on substrates.    -   Robot: A machine or device, that operates automatically or by        remote control, whose function is typically to perform the        operations that move a job between tools, or that handle        substrates within a tool.    -   Round: Any closed shape of continuous curvature.    -   Substrates: A body or base layer, forming a product, that        supports itself and the result of processes performed on it.    -   Tool: A manufacturing entity designed to perform a processing        step or multiple different processing steps. A tool can have the        capability of interfacing with automation for handling jobs of        substrates. A tool can also have single or multiple integrated        chambers or processing regions. A tool can interface to        facilities support as necessary and can incorporate the        necessary systems for controlling its processes.    -   Tool Body: That portion of a tool other than the portion forming        its port.    -   Tool Port: That portion of a tool forming a point of exit or        entry for jobs to be processed by the tool. Thus the port        provides an interface to any job-handling automation of the        tool.    -   Tubular: Having a shape that can be described as any closed        figure projected along its perpendicular and hollowed out to        some extent.    -   Unidirectional: Describing a flow which has a tendency to        proceed generally along a particular direction albeit not        exclusively in a straight path. In clean air flow, the        unidirectional characteristic is important to ensuring        particulate matter is moved out of the cleanspace.    -   Unobstructed removability: refers to geometric properties, of        fabs constructed in accordance with the present invention, that        provide for a relatively unobstructed path by which a tool can        be removed or installed.    -   Utilities: A broad term covering the entities created or used to        support fabrication environments or their tooling, but not the        processing tooling or processing space itself. This includes        electricity, gasses, air flows, chemicals (and other bulk        materials) and environmental controls (e.g., temperature).    -   Vertical: A direction that is, or is close to being, parallel to        the direction of gravitational force.

While the invention has been described in conjunction with specificembodiments, it is evident that many alternatives, modifications andvariations will be apparent to those skilled in the art in light of theforegoing description. Accordingly, this description is intended toembrace all such alternatives, modifications and variations as fallwithin its spirit and scope.

What is claimed is:
 1. A fabricator for containing a plurality ofprocessing tools, the fabricator comprising: multiple levels ofprocessing tools, wherein at least a second level of processing tools isoriented vertically above at least a first level of processing tools,wherein a first processing tool on the first level of processing toolsand a second processing tool on the second level are configured toprocess substrates; a primary cleanspace bounded in part by a firstvertical wall and a second vertical wall, wherein said primarycleanspace is located between the first vertical wall and the secondvertical wall, wherein within the primary cleanspace a substrate may betransported from the first level of processing tools to the second levelof processing tools; and an air source for providing air flow throughthe primary cleanspace in a predetermined uni-direction from the firstvertical wall to the second vertical wall.
 2. The fabricator of claim 1wherein the first processing tool comprises a tool port that receivesjobs of substrates from a fabricator automation facility, a tool bodythat is interfaced to fabricator facilities including one or more ofutilities, chemicals and gases, and at least a first integrated chamberor processing region.
 3. The fabricator of claim 1 wherein the firstvertical wall and the second vertical wall are essentially planar. 4.The fabricator of claim 1 wherein a floor is located above at least aportion of the first level of processing tools is beneath at least aportion of the second level of processing tools.
 5. The fabricator ofclaim 2 additionally comprising: two or more flanges, each flange sealedto a respective opening in at least one of the vertical walls, each saidflange additionally sealable to one of the plurality of fabricationtools.
 6. The fabricator of claim 5 wherein: each flange facilitates thecontainment of air within the primary cleanspace; and at least a firsttool port of a first tool is within the primary cleanspace while thefirst tool body of a first tool is external to the primary cleanspace.7. The fabricator of claim 6 wherein: each fabrication tool is capableof independent operation and removable in a discrete fashion relative toother fabrication tools.
 8. The fabricator of claim 7 wherein theremoval in a discrete fashion removes the tool from a cleanspace.
 9. Thefabricator of claim 7 wherein: a material to be processed by theplurality of tools can be transferred from a port of the first tool to aport of a second tool through the primary cleanspace.
 10. The fabricatorof claim 7 wherein: the multiple levels of processing tools comprisemore than two levels.
 11. The fabricator of claim 10 wherein thesubstrate comprises a semiconductor.
 12. A method of forming afabricator; the method comprising the steps of: forming a primarycleanspace wherein the forming of the cleanspace comprises a step offorming a first vertical wall and a step of forming a second verticalwall; placing an air source within the fabricator for providing air flowthrough the primary cleanspace in a predetermined uni-direction from thefirst vertical wall to the second vertical wall; and forming multiplelevels to position tools in a vertical orientation.
 13. The method offorming a fabricator of claim 12 additionally comprising: placing aprocessing tool comprising a tool port that receives jobs of substratesfrom a fabricator automation facility, a tool body that is interfaced tofabricator facilities including one or more of utilities, chemicals andgases, and at least a first integrated chamber or processing region inone of the multiple levels.
 14. A method of processing substrates; themethod comprising the steps of: moving a substrate within a primarycleanspace comprised within a fabricator from a first processing tool toa second processing tool, wherein the primary cleanspace comprises afirst vertical wall and a second vertical wall, wherein an air sourcewithin the fabricator provides air flow through the primary cleanspacein a predetermined uni-direction from the first vertical wall to thesecond vertical wall, and wherein the first processing tool Is locatedon a first level of processing tools and the second processing tool islocated on a second level of processing tools.
 15. The method ofprocessing substrates of claim 14 additionally comprising the step ofperforming a process on the substrate in the second processing tool. 16.The method of processing substrates of claim 14 wherein the substratesupports processing of a semiconductor material.
 17. The method ofprocessing substrates of claim 14 wherein the substrate supportsprocessing of a non-semiconductor material.
 18. The method of processingsubstrates of claim 15 wherein the product of the processing in thesecond processing tool comprises a semiconductor material.
 19. Themethod of processing substrates of claim 14 wherein the first processingtool comprises a tool port that receives jobs of substrates from afabricator automation facility, a tool body that is interfaced tofabricator facilities including one or more of utilities, chemicals andgases, and at least a first integrated chamber or processing region. 20.The method of processing substrates of claim 19 wherein the firstprocessing tool replaced an initial first processing tool in areversibly removable manner wherein the removal occurs in a discretefashion relative to other fabrication.